SAW Sensors
Surface Acoustic Wave (SAW) Wafer

SAW sensor is a new type sensor combining SAW technology with physics, materials, microelectronics and signal processing. The research of SAW sensors began in the 1970s. SAW technology based sensor enables passive, wireless and non-contact detection under certain environmental conditions. SAW technology can be used in a variety of sensors. For example, it can be used in torque and tire pressure sensors, chemical sensors, gas sensors, humidity sensors, temperature sensors, and mass sensors, etc.
SAW sensors are widely used in automotive electronics industry (torque and tire pressure sensors), pharmaceutical and chemical (biological and chemical sensors), industrial and commercial applications (gas, humidity, temperature, and mass sensors), aerospace, environmental monitoring, military and homeland safety. SAW RFID electronic tags also have wide application in logistics management, public transport, access control, security, airline baggage sorting, parcel tracking, factory assembly line control and tracking, equipment and asset management, aerospace and other fields.
The most commonly used and ideal material of SAW sensors is quartz (SiO2), lithium niobate (LiNbO3) and lithium tantalate (LiTaO3), and langasite (LGS).